[Gmsh] Problem with mesh size on Points / Warning during the 3D mesh

[Benoit CURVERS]

Dear everyone,

I have some trouble with GMSH.
I'm working with the version 3.0.7 to have access to the new feature on the Boolean operation
You can find the .geo file below

When I create my .geo file, I order my layer according to the mesh size on the point.
On the substrate N1, I would like to have a 1 parameter mesh size in all the defined points.
But, in my structure, I have some created points on the line of the substrate N1 with a different mesh size (as you can see on the image)
[cid:image004.png at 01D40304.BEF61DA0]
When I perform a meshing, I don't obtain what I want (a refined mesh in the substrate with the same size for all the elments, as you can see below)
[cid:image006.jpg at 01D40304.BEF61DA0]

So, I would like to know how can I avoid this problem ? Is there another option than create an interface with the same mesh size of the substrate between the two layer ?

Also, with the same .geo file, I fix the mesh size in all the block at 1 except for the last two block. I keep the previous mesh size (block Substrate N2 with 201 and Air with 20).
When I perform the 3D mesh, I obtain this warning : "Warning : Impossible to smooth vertex". I don't want to obtain any warning during the mesh.
What does this warning mean ? How can I avoid obtaining this warning ?
Because when I reduce the mesh size of the substrate N2 (from 201 to 140), I don't obtain this warning.

Thank you for your answers,

Kind regards,

Benoît CURVERS
Laser Systems & Solutions of Europe (LASSE)
SCREEN Semiconductor Solutions Co. Ltd
Taïwan Cell : 0965875974 or 7629511
Email : benoit.curvers at screen-lasse.com<mailto:benoit.curvers at screen-lasse.com>

Below, you can find the .geo file :
SetFactory("OpenCASCADE");
// L2
p10=newp; Point(p10) = {-15,-175.5,-33.5, 1};
p11=newp; Point(p11) = {-5,-175.5,-33.5, 1};
p12=newp; Point(p12) = {0,-170,-33.5, 1};
p13=newp; Point(p13) = {5,-175.5,-33.5, 1};
p14=newp; Point(p14) = {15,-175.5,-33.5, 1};
p15=newp; Point(p15) = {30,-160,-33.5, 1};
p16=newp; Point(p16) = {24.5,-147.5,-33.5, 1};
p17=newp; Point(p17) = {24.5,-160,-33.5, 1};
p18=newp; Point(p18) = {15,-170,-33.5, 1};
p19=newp; Point(p19) = {5,-170,-33.5, 1};
p110=newp; Point(p110) = {0,-164.5,-33.5, 1};
p111=newp; Point(p111) = {-5,-170,-33.5, 1};
p112=newp; Point(p112) = {-15,-170,-33.5, 1};
p113=newp; Point(p113) = {-24.5,-160,-33.5, 1};
p114=newp; Point(p114) = {-24.5,-147.5,-33.5, 1};
p115=newp; Point(p115) = {-30,-160,-33.5, 1};
l10=newl; Line(l10) = {p10,p11};
l11=newl; Line(l11) = {p11,p12};
l12=newl; Line(l12) = {p12,p13};
l13=newl; Line(l13) = {p13,p14};
l14=newl; Line(l14) = {p14,p15};
l15=newl; Line(l15) = {p15,p16};
l16=newl; Line(l16) = {p16,p17};
l17=newl; Line(l17) = {p17,p18};
l18=newl; Line(l18) = {p18,p19};
l19=newl; Line(l19) = {p19,p110};
l110=newl; Line(l110) = {p110,p111};
l111=newl; Line(l111) = {p111,p112};
l112=newl; Line(l112) = {p112,p113};
l113=newl; Line(l113) = {p113,p114};
l114=newl; Line(l114) = {p114,p115};
l115=newl; Line(l115) = {p115,p10};
ll10 = newll; Line Loop(ll10) = {l10,l11,l12,l13,l14,l15,l16,l17,l18,l19,l110,l111,l112,l113,l114,l115};
rs10 = news ; Plane Surface(rs10) = {ll10};
ex10[]= Extrude{0,0,17}{ Surface{rs10}; };
Physical Volume(1)={ex10[1]};
// L2_2
p20=newp; Point(p20) = {-15,-175.5,16.5, 1};
p21=newp; Point(p21) = {-5,-175.5,16.5, 1};
p22=newp; Point(p22) = {0,-170,16.5, 1};
p23=newp; Point(p23) = {5,-175.5,16.5, 1};
p24=newp; Point(p24) = {15,-175.5,16.5, 1};
p25=newp; Point(p25) = {30,-160,16.5, 1};
p26=newp; Point(p26) = {24.5,-147.5,16.5, 1};
p27=newp; Point(p27) = {24.5,-160,16.5, 1};
p28=newp; Point(p28) = {15,-170,16.5, 1};
p29=newp; Point(p29) = {5,-170,16.5, 1};
p210=newp; Point(p210) = {0,-164.5,16.5, 1};
p211=newp; Point(p211) = {-5,-170,16.5, 1};
p212=newp; Point(p212) = {-15,-170,16.5, 1};
p213=newp; Point(p213) = {-24.5,-160,16.5, 1};
p214=newp; Point(p214) = {-24.5,-147.5,16.5, 1};
p215=newp; Point(p215) = {-30,-160,16.5, 1};
l20=newl; Line(l20) = {p20,p21};
l21=newl; Line(l21) = {p21,p22};
l22=newl; Line(l22) = {p22,p23};
l23=newl; Line(l23) = {p23,p24};
l24=newl; Line(l24) = {p24,p25};
l25=newl; Line(l25) = {p25,p26};
l26=newl; Line(l26) = {p26,p27};
l27=newl; Line(l27) = {p27,p28};
l28=newl; Line(l28) = {p28,p29};
l29=newl; Line(l29) = {p29,p210};
l210=newl; Line(l210) = {p210,p211};
l211=newl; Line(l211) = {p211,p212};
l212=newl; Line(l212) = {p212,p213};
l213=newl; Line(l213) = {p213,p214};
l214=newl; Line(l214) = {p214,p215};
l215=newl; Line(l215) = {p215,p20};
ll20 = newll; Line Loop(ll20) = {l20,l21,l22,l23,l24,l25,l26,l27,l28,l29,l210,l211,l212,l213,l214,l215};
rs20 = news ; Plane Surface(rs20) = {ll20};
ex20[]= Extrude{0,0,17}{ Surface{rs20}; };
Physical Volume(2)={ex20[1]};
// L2_3
p30=newp; Point(p30) = {-15,-175.5,-83.5, 1};
p31=newp; Point(p31) = {-5,-175.5,-83.5, 1};
p32=newp; Point(p32) = {0,-170,-83.5, 1};
p33=newp; Point(p33) = {5,-175.5,-83.5, 1};
p34=newp; Point(p34) = {15,-175.5,-83.5, 1};
p35=newp; Point(p35) = {30,-160,-83.5, 1};
p36=newp; Point(p36) = {24.5,-147.5,-83.5, 1};
p37=newp; Point(p37) = {24.5,-160,-83.5, 1};
p38=newp; Point(p38) = {15,-170,-83.5, 1};
p39=newp; Point(p39) = {5,-170,-83.5, 1};
p310=newp; Point(p310) = {0,-164.5,-83.5, 1};
p311=newp; Point(p311) = {-5,-170,-83.5, 1};
p312=newp; Point(p312) = {-15,-170,-83.5, 1};
p313=newp; Point(p313) = {-24.5,-160,-83.5, 1};
p314=newp; Point(p314) = {-24.5,-147.5,-83.5, 1};
p315=newp; Point(p315) = {-30,-160,-83.5, 1};
l30=newl; Line(l30) = {p30,p31};
l31=newl; Line(l31) = {p31,p32};
l32=newl; Line(l32) = {p32,p33};
l33=newl; Line(l33) = {p33,p34};
l34=newl; Line(l34) = {p34,p35};
l35=newl; Line(l35) = {p35,p36};
l36=newl; Line(l36) = {p36,p37};
l37=newl; Line(l37) = {p37,p38};
l38=newl; Line(l38) = {p38,p39};
l39=newl; Line(l39) = {p39,p310};
l310=newl; Line(l310) = {p310,p311};
l311=newl; Line(l311) = {p311,p312};
l312=newl; Line(l312) = {p312,p313};
l313=newl; Line(l313) = {p313,p314};
l314=newl; Line(l314) = {p314,p315};
l315=newl; Line(l315) = {p315,p30};
ll30 = newll; Line Loop(ll30) = {l30,l31,l32,l33,l34,l35,l36,l37,l38,l39,l310,l311,l312,l313,l314,l315};
rs30 = news ; Plane Surface(rs30) = {ll30};
ex30[]= Extrude{0,0,17}{ Surface{rs30}; };
Physical Volume(3)={ex30[1]};
// Gate
p40=newp; Point(p40) = {-93,-209,-8.5, 1};
p41=newp; Point(p41) = {93,-209,-8.5, 1};
p42=newp; Point(p42) = {93,-132,-8.5, 1};
p43=newp; Point(p43) = {21,-132,-8.5, 1};
p44=newp; Point(p44) = {21,-192,-8.5, 1};
p45=newp; Point(p45) = {8,-192,-8.5, 1};
p46=newp; Point(p46) = {8,-132,-8.5, 1};
p47=newp; Point(p47) = {-8,-132,-8.5, 1};
p48=newp; Point(p48) = {-8,-192,-8.5, 1};
p49=newp; Point(p49) = {-21,-192,-8.5, 1};
p410=newp; Point(p410) = {-21,-132,-8.5, 1};
p411=newp; Point(p411) = {-93,-132,-8.5, 1};
l40=newl; Line(l40) = {p40,p41};
l41=newl; Line(l41) = {p41,p42};
l42=newl; Line(l42) = {p42,p43};
l43=newl; Line(l43) = {p43,p44};
l44=newl; Line(l44) = {p44,p45};
l45=newl; Line(l45) = {p45,p46};
l46=newl; Line(l46) = {p46,p47};
l47=newl; Line(l47) = {p47,p48};
l48=newl; Line(l48) = {p48,p49};
l49=newl; Line(l49) = {p49,p410};
l410=newl; Line(l410) = {p410,p411};
l411=newl; Line(l411) = {p411,p40};
ll40 = newll; Line Loop(ll40) = {l40,l41,l42,l43,l44,l45,l46,l47,l48,l49,l410,l411};
rs40 = news ; Plane Surface(rs40) = {ll40};
ex40[]= Extrude{0,0,17}{ Surface{rs40}; };
Physical Volume(4)={ex40[1]};
// Gate_2
p50=newp; Point(p50) = {-93,-209,-58.5, 1};
p51=newp; Point(p51) = {93,-209,-58.5, 1};
p52=newp; Point(p52) = {93,-132,-58.5, 1};
p53=newp; Point(p53) = {21,-132,-58.5, 1};
p54=newp; Point(p54) = {21,-192,-58.5, 1};
p55=newp; Point(p55) = {8,-192,-58.5, 1};
p56=newp; Point(p56) = {8,-132,-58.5, 1};
p57=newp; Point(p57) = {-8,-132,-58.5, 1};
p58=newp; Point(p58) = {-8,-192,-58.5, 1};
p59=newp; Point(p59) = {-21,-192,-58.5, 1};
p510=newp; Point(p510) = {-21,-132,-58.5, 1};
p511=newp; Point(p511) = {-93,-132,-58.5, 1};
l50=newl; Line(l50) = {p50,p51};
l51=newl; Line(l51) = {p51,p52};
l52=newl; Line(l52) = {p52,p53};
l53=newl; Line(l53) = {p53,p54};
l54=newl; Line(l54) = {p54,p55};
l55=newl; Line(l55) = {p55,p56};
l56=newl; Line(l56) = {p56,p57};
l57=newl; Line(l57) = {p57,p58};
l58=newl; Line(l58) = {p58,p59};
l59=newl; Line(l59) = {p59,p510};
l510=newl; Line(l510) = {p510,p511};
l511=newl; Line(l511) = {p511,p50};
ll50 = newll; Line Loop(ll50) = {l50,l51,l52,l53,l54,l55,l56,l57,l58,l59,l510,l511};
rs50 = news ; Plane Surface(rs50) = {ll50};
ex50[]= Extrude{0,0,17}{ Surface{rs50}; };
Physical Volume(5)={ex50[1]};
// L1
p60=newp; Point(p60) = {-10,-155,-33.5, 1};
p61=newp; Point(p61) = {-19,-155,-33.5, 1};
p62=newp; Point(p62) = {-24.5,-147.5,-33.5, 1};
p63=newp; Point(p63) = {-24.5,-160,-33.5, 1};
p64=newp; Point(p64) = {-15,-170,-33.5, 1};
p65=newp; Point(p65) = {-5,-170,-33.5, 1};
p66=newp; Point(p66) = {0,-164.5,-33.5, 1};
p67=newp; Point(p67) = {5,-170,-33.5, 1};
p68=newp; Point(p68) = {15,-170,-33.5, 1};
p69=newp; Point(p69) = {24.5,-160,-33.5, 1};
p610=newp; Point(p610) = {24.5,-147.5,-33.5, 1};
p611=newp; Point(p611) = {19,-155,-33.5, 1};
p612=newp; Point(p612) = {10,-155,-33.5, 1};
p613=newp; Point(p613) = {0,-147.5,-33.5, 1};
l60=newl; Line(l60) = {p60,p61};
l61=newl; Line(l61) = {p61,p62};
l62=newl; Line(l62) = {p62,p63};
l63=newl; Line(l63) = {p63,p64};
l64=newl; Line(l64) = {p64,p65};
l65=newl; Line(l65) = {p65,p66};
l66=newl; Line(l66) = {p66,p67};
l67=newl; Line(l67) = {p67,p68};
l68=newl; Line(l68) = {p68,p69};
l69=newl; Line(l69) = {p69,p610};
l610=newl; Line(l610) = {p610,p611};
l611=newl; Line(l611) = {p611,p612};
l612=newl; Line(l612) = {p612,p613};
l613=newl; Line(l613) = {p613,p60};
ll60 = newll; Line Loop(ll60) = {l60,l61,l62,l63,l64,l65,l66,l67,l68,l69,l610,l611,l612,l613};
rs60 = news ; Plane Surface(rs60) = {ll60};
ex60[]= Extrude{0,0,17}{ Surface{rs60}; };
Physical Volume(6)={ex60[1]};
// L1_2
p70=newp; Point(p70) = {-10,-155,16.5, 1};
p71=newp; Point(p71) = {-19,-155,16.5, 1};
p72=newp; Point(p72) = {-24.5,-147.5,16.5, 1};
p73=newp; Point(p73) = {-24.5,-160,16.5, 1};
p74=newp; Point(p74) = {-15,-170,16.5, 1};
p75=newp; Point(p75) = {-5,-170,16.5, 1};
p76=newp; Point(p76) = {0,-164.5,16.5, 1};
p77=newp; Point(p77) = {5,-170,16.5, 1};
p78=newp; Point(p78) = {15,-170,16.5, 1};
p79=newp; Point(p79) = {24.5,-160,16.5, 1};
p710=newp; Point(p710) = {24.5,-147.5,16.5, 1};
p711=newp; Point(p711) = {19,-155,16.5, 1};
p712=newp; Point(p712) = {10,-155,16.5, 1};
p713=newp; Point(p713) = {0,-147.5,16.5, 1};
l70=newl; Line(l70) = {p70,p71};
l71=newl; Line(l71) = {p71,p72};
l72=newl; Line(l72) = {p72,p73};
l73=newl; Line(l73) = {p73,p74};
l74=newl; Line(l74) = {p74,p75};
l75=newl; Line(l75) = {p75,p76};
l76=newl; Line(l76) = {p76,p77};
l77=newl; Line(l77) = {p77,p78};
l78=newl; Line(l78) = {p78,p79};
l79=newl; Line(l79) = {p79,p710};
l710=newl; Line(l710) = {p710,p711};
l711=newl; Line(l711) = {p711,p712};
l712=newl; Line(l712) = {p712,p713};
l713=newl; Line(l713) = {p713,p70};
ll70 = newll; Line Loop(ll70) = {l70,l71,l72,l73,l74,l75,l76,l77,l78,l79,l710,l711,l712,l713};
rs70 = news ; Plane Surface(rs70) = {ll70};
ex70[]= Extrude{0,0,17}{ Surface{rs70}; };
Physical Volume(7)={ex70[1]};
// L1_3
p80=newp; Point(p80) = {-10,-155,-83.5, 1};
p81=newp; Point(p81) = {-19,-155,-83.5, 1};
p82=newp; Point(p82) = {-24.5,-147.5,-83.5, 1};
p83=newp; Point(p83) = {-24.5,-160,-83.5, 1};
p84=newp; Point(p84) = {-15,-170,-83.5, 1};
p85=newp; Point(p85) = {-5,-170,-83.5, 1};
p86=newp; Point(p86) = {0,-164.5,-83.5, 1};
p87=newp; Point(p87) = {5,-170,-83.5, 1};
p88=newp; Point(p88) = {15,-170,-83.5, 1};
p89=newp; Point(p89) = {24.5,-160,-83.5, 1};
p810=newp; Point(p810) = {24.5,-147.5,-83.5, 1};
p811=newp; Point(p811) = {19,-155,-83.5, 1};
p812=newp; Point(p812) = {10,-155,-83.5, 1};
p813=newp; Point(p813) = {0,-147.5,-83.5, 1};
l80=newl; Line(l80) = {p80,p81};
l81=newl; Line(l81) = {p81,p82};
l82=newl; Line(l82) = {p82,p83};
l83=newl; Line(l83) = {p83,p84};
l84=newl; Line(l84) = {p84,p85};
l85=newl; Line(l85) = {p85,p86};
l86=newl; Line(l86) = {p86,p87};
l87=newl; Line(l87) = {p87,p88};
l88=newl; Line(l88) = {p88,p89};
l89=newl; Line(l89) = {p89,p810};
l810=newl; Line(l810) = {p810,p811};
l811=newl; Line(l811) = {p811,p812};
l812=newl; Line(l812) = {p812,p813};
l813=newl; Line(l813) = {p813,p80};
ll80 = newll; Line Loop(ll80) = {l80,l81,l82,l83,l84,l85,l86,l87,l88,l89,l810,l811,l812,l813};
rs80 = news ; Plane Surface(rs80) = {ll80};
ex80[]= Extrude{0,0,17}{ Surface{rs80}; };
Physical Volume(8)={ex80[1]};
// L0
p90=newp; Point(p90) = {-19,-130,-33.5, 1};
p91=newp; Point(p91) = {-24.5,-147.5,-33.5, 1};
p92=newp; Point(p92) = {-19,-155,-33.5, 1};
p93=newp; Point(p93) = {-10,-155,-33.5, 1};
p94=newp; Point(p94) = {0,-147.5,-33.5, 1};
p95=newp; Point(p95) = {10,-155,-33.5, 1};
p96=newp; Point(p96) = {19,-155,-33.5, 1};
p97=newp; Point(p97) = {24.5,-147.5,-33.5, 1};
p98=newp; Point(p98) = {19,-130,-33.5, 1};
p99=newp; Point(p99) = {19,-140,-33.5, 1};
p910=newp; Point(p910) = {10,-140,-33.5, 1};
p911=newp; Point(p911) = {10,-130,-33.5, 1};
p912=newp; Point(p912) = {0,-140,-33.5, 1};
p913=newp; Point(p913) = {-10,-130,-33.5, 1};
p914=newp; Point(p914) = {-10,-140,-33.5, 1};
p915=newp; Point(p915) = {-19,-140,-33.5, 1};
l90=newl; Line(l90) = {p90,p91};
l91=newl; Line(l91) = {p91,p92};
l92=newl; Line(l92) = {p92,p93};
l93=newl; Line(l93) = {p93,p94};
l94=newl; Line(l94) = {p94,p95};
l95=newl; Line(l95) = {p95,p96};
l96=newl; Line(l96) = {p96,p97};
l97=newl; Line(l97) = {p97,p98};
l98=newl; Line(l98) = {p98,p99};
l99=newl; Line(l99) = {p99,p910};
l910=newl; Line(l910) = {p910,p911};
l911=newl; Line(l911) = {p911,p912};
l912=newl; Line(l912) = {p912,p913};
l913=newl; Line(l913) = {p913,p914};
l914=newl; Line(l914) = {p914,p915};
l915=newl; Line(l915) = {p915,p90};
ll90 = newll; Line Loop(ll90) = {l90,l91,l92,l93,l94,l95,l96,l97,l98,l99,l910,l911,l912,l913,l914,l915};
rs90 = news ; Plane Surface(rs90) = {ll90};
ex90[]= Extrude{0,0,17}{ Surface{rs90}; };
Physical Volume(9)={ex90[1]};
// L0_2
p100=newp; Point(p100) = {-19,-130,16.5, 1};
p101=newp; Point(p101) = {-24.5,-147.5,16.5, 1};
p102=newp; Point(p102) = {-19,-155,16.5, 1};
p103=newp; Point(p103) = {-10,-155,16.5, 1};
p104=newp; Point(p104) = {0,-147.5,16.5, 1};
p105=newp; Point(p105) = {10,-155,16.5, 1};
p106=newp; Point(p106) = {19,-155,16.5, 1};
p107=newp; Point(p107) = {24.5,-147.5,16.5, 1};
p108=newp; Point(p108) = {19,-130,16.5, 1};
p109=newp; Point(p109) = {19,-140,16.5, 1};
p1010=newp; Point(p1010) = {10,-140,16.5, 1};
p1011=newp; Point(p1011) = {10,-130,16.5, 1};
p1012=newp; Point(p1012) = {0,-140,16.5, 1};
p1013=newp; Point(p1013) = {-10,-130,16.5, 1};
p1014=newp; Point(p1014) = {-10,-140,16.5, 1};
p1015=newp; Point(p1015) = {-19,-140,16.5, 1};
l100=newl; Line(l100) = {p100,p101};
l101=newl; Line(l101) = {p101,p102};
l102=newl; Line(l102) = {p102,p103};
l103=newl; Line(l103) = {p103,p104};
l104=newl; Line(l104) = {p104,p105};
l105=newl; Line(l105) = {p105,p106};
l106=newl; Line(l106) = {p106,p107};
l107=newl; Line(l107) = {p107,p108};
l108=newl; Line(l108) = {p108,p109};
l109=newl; Line(l109) = {p109,p1010};
l1010=newl; Line(l1010) = {p1010,p1011};
l1011=newl; Line(l1011) = {p1011,p1012};
l1012=newl; Line(l1012) = {p1012,p1013};
l1013=newl; Line(l1013) = {p1013,p1014};
l1014=newl; Line(l1014) = {p1014,p1015};
l1015=newl; Line(l1015) = {p1015,p100};
ll100 = newll; Line Loop(ll100) = {l100,l101,l102,l103,l104,l105,l106,l107,l108,l109,l1010,l1011,l1012,l1013,l1014,l1015};
rs100 = news ; Plane Surface(rs100) = {ll100};
ex100[]= Extrude{0,0,17}{ Surface{rs100}; };
Physical Volume(10)={ex100[1]};
// L0_3
p110=newp; Point(p110) = {-19,-130,-83.5, 1};
p111=newp; Point(p111) = {-24.5,-147.5,-83.5, 1};
p112=newp; Point(p112) = {-19,-155,-83.5, 1};
p113=newp; Point(p113) = {-10,-155,-83.5, 1};
p114=newp; Point(p114) = {0,-147.5,-83.5, 1};
p115=newp; Point(p115) = {10,-155,-83.5, 1};
p116=newp; Point(p116) = {19,-155,-83.5, 1};
p117=newp; Point(p117) = {24.5,-147.5,-83.5, 1};
p118=newp; Point(p118) = {19,-130,-83.5, 1};
p119=newp; Point(p119) = {19,-140,-83.5, 1};
p1110=newp; Point(p1110) = {10,-140,-83.5, 1};
p1111=newp; Point(p1111) = {10,-130,-83.5, 1};
p1112=newp; Point(p1112) = {0,-140,-83.5, 1};
p1113=newp; Point(p1113) = {-10,-130,-83.5, 1};
p1114=newp; Point(p1114) = {-10,-140,-83.5, 1};
p1115=newp; Point(p1115) = {-19,-140,-83.5, 1};
l110=newl; Line(l110) = {p110,p111};
l111=newl; Line(l111) = {p111,p112};
l112=newl; Line(l112) = {p112,p113};
l113=newl; Line(l113) = {p113,p114};
l114=newl; Line(l114) = {p114,p115};
l115=newl; Line(l115) = {p115,p116};
l116=newl; Line(l116) = {p116,p117};
l117=newl; Line(l117) = {p117,p118};
l118=newl; Line(l118) = {p118,p119};
l119=newl; Line(l119) = {p119,p1110};
l1110=newl; Line(l1110) = {p1110,p1111};
l1111=newl; Line(l1111) = {p1111,p1112};
l1112=newl; Line(l1112) = {p1112,p1113};
l1113=newl; Line(l1113) = {p1113,p1114};
l1114=newl; Line(l1114) = {p1114,p1115};
l1115=newl; Line(l1115) = {p1115,p110};
ll110 = newll; Line Loop(ll110) = {l110,l111,l112,l113,l114,l115,l116,l117,l118,l119,l1110,l1111,l1112,l1113,l1114,l1115};
rs110 = news ; Plane Surface(rs110) = {ll110};
ex110[]= Extrude{0,0,17}{ Surface{rs110}; };
Physical Volume(11)={ex110[1]};
// Fin_1
p120=newp; Point(p120) = {-20.5,-90,-83.5, 1};
p121=newp; Point(p121) = {-19,-130,-83.5, 1};
p122=newp; Point(p122) = {-10,-130,-83.5, 1};
p123=newp; Point(p123) = {-8.5,-90,-83.5, 1};
p124=newp; Point(p124) = {-7,-50,-83.5, 1};
p125=newp; Point(p125) = {-22,-50,-83.5, 1};
l120=newl; Line(l120) = {p120,p121};
l121=newl; Line(l121) = {p121,p122};
l122=newl; Line(l122) = {p122,p123};
l123=newl; Line(l123) = {p123,p124};
l124=newl; Line(l124) = {p124,p125};
l125=newl; Line(l125) = {p125,p120};
ll120 = newll; Line Loop(ll120) = {l120,l121,l122,l123,l124,l125};
rs120 = news ; Plane Surface(rs120) = {ll120};
ex120[]= Extrude{0,0,117}{ Surface{rs120}; };
Physical Volume(12)={ex120[1]};
// Fin_2
p130=newp; Point(p130) = {10,-130,-83.5, 1};
p131=newp; Point(p131) = {19,-130,-83.5, 1};
p132=newp; Point(p132) = {20.5,-90,-83.5, 1};
p133=newp; Point(p133) = {22,-50,-83.5, 1};
p134=newp; Point(p134) = {7,-50,-83.5, 1};
p135=newp; Point(p135) = {8.5,-90,-83.5, 1};
l130=newl; Line(l130) = {p130,p131};
l131=newl; Line(l131) = {p131,p132};
l132=newl; Line(l132) = {p132,p133};
l133=newl; Line(l133) = {p133,p134};
l134=newl; Line(l134) = {p134,p135};
l135=newl; Line(l135) = {p135,p130};
ll130 = newll; Line Loop(ll130) = {l130,l131,l132,l133,l134,l135};
rs130 = news ; Plane Surface(rs130) = {ll130};
ex130[]= Extrude{0,0,117}{ Surface{rs130}; };
Physical Volume(13)={ex130[1]};
// Fin_1_SiGe_1
p140=newp; Point(p140) = {-19,-140,-33.5, 1};
p141=newp; Point(p141) = {-10,-140,-33.5, 1};
p142=newp; Point(p142) = {-10,-130,-33.5, 1};
p143=newp; Point(p143) = {-19,-130,-33.5, 1};
l140=newl; Line(l140) = {p140,p141};
l141=newl; Line(l141) = {p141,p142};
l142=newl; Line(l142) = {p142,p143};
l143=newl; Line(l143) = {p143,p140};
ll140 = newll; Line Loop(ll140) = {l140,l141,l142,l143};
rs140 = news ; Plane Surface(rs140) = {ll140};
ex140[]= Extrude{0,0,17}{ Surface{rs140}; };
Physical Volume(14)={ex140[1]};
// Fin_1_SiGe_2
p150=newp; Point(p150) = {-19,-140,16.5, 1};
p151=newp; Point(p151) = {-10,-140,16.5, 1};
p152=newp; Point(p152) = {-10,-130,16.5, 1};
p153=newp; Point(p153) = {-19,-130,16.5, 1};
l150=newl; Line(l150) = {p150,p151};
l151=newl; Line(l151) = {p151,p152};
l152=newl; Line(l152) = {p152,p153};
l153=newl; Line(l153) = {p153,p150};
ll150 = newll; Line Loop(ll150) = {l150,l151,l152,l153};
rs150 = news ; Plane Surface(rs150) = {ll150};
ex150[]= Extrude{0,0,17}{ Surface{rs150}; };
Physical Volume(15)={ex150[1]};
// Fin_1_SiGe_3
p160=newp; Point(p160) = {-19,-140,-83.5, 1};
p161=newp; Point(p161) = {-10,-140,-83.5, 1};
p162=newp; Point(p162) = {-10,-130,-83.5, 1};
p163=newp; Point(p163) = {-19,-130,-83.5, 1};
l160=newl; Line(l160) = {p160,p161};
l161=newl; Line(l161) = {p161,p162};
l162=newl; Line(l162) = {p162,p163};
l163=newl; Line(l163) = {p163,p160};
ll160 = newll; Line Loop(ll160) = {l160,l161,l162,l163};
rs160 = news ; Plane Surface(rs160) = {ll160};
ex160[]= Extrude{0,0,17}{ Surface{rs160}; };
Physical Volume(16)={ex160[1]};
// Fin_2_SiGe_1
p170=newp; Point(p170) = {10,-140,-33.5, 1};
p171=newp; Point(p171) = {19,-140,-33.5, 1};
p172=newp; Point(p172) = {19,-130,-33.5, 1};
p173=newp; Point(p173) = {10,-130,-33.5, 1};
l170=newl; Line(l170) = {p170,p171};
l171=newl; Line(l171) = {p171,p172};
l172=newl; Line(l172) = {p172,p173};
l173=newl; Line(l173) = {p173,p170};
ll170 = newll; Line Loop(ll170) = {l170,l171,l172,l173};
rs170 = news ; Plane Surface(rs170) = {ll170};
ex170[]= Extrude{0,0,17}{ Surface{rs170}; };
Physical Volume(17)={ex170[1]};
// Fin_2_SiGe_2
p180=newp; Point(p180) = {10,-140,16.5, 1};
p181=newp; Point(p181) = {19,-140,16.5, 1};
p182=newp; Point(p182) = {19,-130,16.5, 1};
p183=newp; Point(p183) = {10,-130,16.5, 1};
l180=newl; Line(l180) = {p180,p181};
l181=newl; Line(l181) = {p181,p182};
l182=newl; Line(l182) = {p182,p183};
l183=newl; Line(l183) = {p183,p180};
ll180 = newll; Line Loop(ll180) = {l180,l181,l182,l183};
rs180 = news ; Plane Surface(rs180) = {ll180};
ex180[]= Extrude{0,0,17}{ Surface{rs180}; };
Physical Volume(18)={ex180[1]};
// Fin_2_SiGe_3
p190=newp; Point(p190) = {10,-140,-83.5, 1};
p191=newp; Point(p191) = {19,-140,-83.5, 1};
p192=newp; Point(p192) = {19,-130,-83.5, 1};
p193=newp; Point(p193) = {10,-130,-83.5, 1};
l190=newl; Line(l190) = {p190,p191};
l191=newl; Line(l191) = {p191,p192};
l192=newl; Line(l192) = {p192,p193};
l193=newl; Line(l193) = {p193,p190};
ll190 = newll; Line Loop(ll190) = {l190,l191,l192,l193};
rs190 = news ; Plane Surface(rs190) = {ll190};
ex190[]= Extrude{0,0,17}{ Surface{rs190}; };
Physical Volume(19)={ex190[1]};
// Fin_SiGe_1
p200=newp; Point(p200) = {-19,-190,-16.5, 1};
p201=newp; Point(p201) = {-10,-190,-16.5, 1};
p202=newp; Point(p202) = {-10,-130,-16.5, 1};
p203=newp; Point(p203) = {-19,-130,-16.5, 1};
l200=newl; Line(l200) = {p200,p201};
l201=newl; Line(l201) = {p201,p202};
l202=newl; Line(l202) = {p202,p203};
l203=newl; Line(l203) = {p203,p200};
ll200 = newll; Line Loop(ll200) = {l200,l201,l202,l203};
rs200 = news ; Plane Surface(rs200) = {ll200};
ex200[]= Extrude{0,0,33}{ Surface{rs200}; };
Physical Volume(20)={ex200[1]};
// Fin_SiGe_2
p210=newp; Point(p210) = {10,-190,-16.5, 1};
p211=newp; Point(p211) = {19,-190,-16.5, 1};
p212=newp; Point(p212) = {19,-130,-16.5, 1};
p213=newp; Point(p213) = {10,-130,-16.5, 1};
l210=newl; Line(l210) = {p210,p211};
l211=newl; Line(l211) = {p211,p212};
l212=newl; Line(l212) = {p212,p213};
l213=newl; Line(l213) = {p213,p210};
ll210 = newll; Line Loop(ll210) = {l210,l211,l212,l213};
rs210 = news ; Plane Surface(rs210) = {ll210};
ex210[]= Extrude{0,0,33}{ Surface{rs210}; };
Physical Volume(21)={ex210[1]};
// Fin_SiGe_3
p220=newp; Point(p220) = {-19,-190,-66.5, 1};
p221=newp; Point(p221) = {-10,-190,-66.5, 1};
p222=newp; Point(p222) = {-10,-130,-66.5, 1};
p223=newp; Point(p223) = {-19,-130,-66.5, 1};
l220=newl; Line(l220) = {p220,p221};
l221=newl; Line(l221) = {p221,p222};
l222=newl; Line(l222) = {p222,p223};
l223=newl; Line(l223) = {p223,p220};
ll220 = newll; Line Loop(ll220) = {l220,l221,l222,l223};
rs220 = news ; Plane Surface(rs220) = {ll220};
ex220[]= Extrude{0,0,25}{ Surface{rs220}; };
Physical Volume(22)={ex220[1]};
// Fin_SiGe_4
p230=newp; Point(p230) = {10,-190,-66.5, 1};
p231=newp; Point(p231) = {19,-190,-66.5, 1};
p232=newp; Point(p232) = {19,-130,-66.5, 1};
p233=newp; Point(p233) = {10,-130,-66.5, 1};
l230=newl; Line(l230) = {p230,p231};
l231=newl; Line(l231) = {p231,p232};
l232=newl; Line(l232) = {p232,p233};
l233=newl; Line(l233) = {p233,p230};
ll230 = newll; Line Loop(ll230) = {l230,l231,l232,l233};
rs230 = news ; Plane Surface(rs230) = {ll230};
ex230[]= Extrude{0,0,25}{ Surface{rs230}; };
Physical Volume(23)={ex230[1]};
// Air_Gap_1
p240=newp; Point(p240) = {-10,-130,-33.5, 1};
p241=newp; Point(p241) = {0,-140,-33.5, 1};
p242=newp; Point(p242) = {10,-130,-33.5, 1};
l240=newl; Line(l240) = {p240,p241};
l241=newl; Line(l241) = {p241,p242};
l242=newl; Line(l242) = {p242,p240};
ll240 = newll; Line Loop(ll240) = {l240,l241,l242};
rs240 = news ; Plane Surface(rs240) = {ll240};
ex240[]= Extrude{0,0,17}{ Surface{rs240}; };
Physical Volume(24)={ex240[1]};
// Air_Gap_2
p250=newp; Point(p250) = {-10,-130,16.5, 1};
p251=newp; Point(p251) = {0,-140,16.5, 1};
p252=newp; Point(p252) = {10,-130,16.5, 1};
l250=newl; Line(l250) = {p250,p251};
l251=newl; Line(l251) = {p251,p252};
l252=newl; Line(l252) = {p252,p250};
ll250 = newll; Line Loop(ll250) = {l250,l251,l252};
rs250 = news ; Plane Surface(rs250) = {ll250};
ex250[]= Extrude{0,0,17}{ Surface{rs250}; };
Physical Volume(25)={ex250[1]};
// Air_Gap_3
p260=newp; Point(p260) = {-10,-130,-83.5, 1};
p261=newp; Point(p261) = {0,-140,-83.5, 1};
p262=newp; Point(p262) = {10,-130,-83.5, 1};
l260=newl; Line(l260) = {p260,p261};
l261=newl; Line(l261) = {p261,p262};
l262=newl; Line(l262) = {p262,p260};
ll260 = newll; Line Loop(ll260) = {l260,l261,l262};
rs260 = news ; Plane Surface(rs260) = {ll260};
ex260[]= Extrude{0,0,17}{ Surface{rs260}; };
Physical Volume(26)={ex260[1]};
// Oxide_2_Side_1_lo
p270=newp; Point(p270) = {55,-130,-33.5, 1};
p271=newp; Point(p271) = {60,-130,-33.5, 1};
p272=newp; Point(p272) = {60,-230,-33.5, 1};
p273=newp; Point(p273) = {96,-230,-33.5, 1};
p274=newp; Point(p274) = {96,-50,-33.5, 1};
p275=newp; Point(p275) = {60,-50,-33.5, 1};
p276=newp; Point(p276) = {22,-50,-33.5, 1};
p277=newp; Point(p277) = {20.5,-90,-33.5, 1};
p278=newp; Point(p278) = {19,-130,-33.5, 1};
p279=newp; Point(p279) = {24.5,-147.5,-33.5, 1};
p2710=newp; Point(p2710) = {30,-160,-33.5, 1};
p2711=newp; Point(p2711) = {32.5,-150,-33.5, 1};
p2712=newp; Point(p2712) = {35,-140,-33.5, 1};
p2713=newp; Point(p2713) = {40,-135,-33.5, 1};
p2714=newp; Point(p2714) = {50,-132.5,-33.5, 1};
l270=newl; Line(l270) = {p270,p271};
l271=newl; Line(l271) = {p271,p272};
l272=newl; Line(l272) = {p272,p273};
l273=newl; Line(l273) = {p273,p274};
l274=newl; Line(l274) = {p274,p275};
l275=newl; Line(l275) = {p275,p276};
l276=newl; Line(l276) = {p276,p277};
l277=newl; Line(l277) = {p277,p278};
l278=newl; Line(l278) = {p278,p279};
l279=newl; Line(l279) = {p279,p2710};
l2710=newl; Line(l2710) = {p2710,p2711};
l2711=newl; Line(l2711) = {p2711,p2712};
l2712=newl; Line(l2712) = {p2712,p2713};
l2713=newl; Line(l2713) = {p2713,p2714};
l2714=newl; Line(l2714) = {p2714,p270};
ll270 = newll; Line Loop(ll270) = {l270,l271,l272,l273,l274,l275,l276,l277,l278,l279,l2710,l2711,l2712,l2713,l2714};
rs270 = news ; Plane Surface(rs270) = {ll270};
ex270[]= Extrude{0,0,17}{ Surface{rs270}; };
Physical Volume(27)={ex270[1]};
// High_k
p340=newp; Point(p340) = {-93,-132,-8.5, 1};
p341=newp; Point(p341) = {-21,-132,-8.5, 1};
p342=newp; Point(p342) = {-21,-192,-8.5, 1};
p343=newp; Point(p343) = {-8,-192,-8.5, 1};
p344=newp; Point(p344) = {-8,-132,-8.5, 1};
p345=newp; Point(p345) = {8,-132,-8.5, 1};
p346=newp; Point(p346) = {8,-192,-8.5, 1};
p347=newp; Point(p347) = {21,-192,-8.5, 1};
p348=newp; Point(p348) = {21,-132,-8.5, 1};
p349=newp; Point(p349) = {93,-132,-8.5, 1};
p3410=newp; Point(p3410) = {93,-130,-8.5, 1};
p3411=newp; Point(p3411) = {19,-130,-8.5, 1};
p3412=newp; Point(p3412) = {19,-190,-8.5, 1};
p3413=newp; Point(p3413) = {10,-190,-8.5, 1};
p3414=newp; Point(p3414) = {10,-130,-8.5, 1};
p3415=newp; Point(p3415) = {-10,-130,-8.5, 1};
p3416=newp; Point(p3416) = {-10,-190,-8.5, 1};
p3417=newp; Point(p3417) = {-19,-190,-8.5, 1};
p3418=newp; Point(p3418) = {-19,-130,-8.5, 1};
p3419=newp; Point(p3419) = {-93,-130,-8.5, 1};
l340=newl; Line(l340) = {p340,p341};
l341=newl; Line(l341) = {p341,p342};
l342=newl; Line(l342) = {p342,p343};
l343=newl; Line(l343) = {p343,p344};
l344=newl; Line(l344) = {p344,p345};
l345=newl; Line(l345) = {p345,p346};
l346=newl; Line(l346) = {p346,p347};
l347=newl; Line(l347) = {p347,p348};
l348=newl; Line(l348) = {p348,p349};
l349=newl; Line(l349) = {p349,p3410};
l3410=newl; Line(l3410) = {p3410,p3411};
l3411=newl; Line(l3411) = {p3411,p3412};
l3412=newl; Line(l3412) = {p3412,p3413};
l3413=newl; Line(l3413) = {p3413,p3414};
l3414=newl; Line(l3414) = {p3414,p3415};
l3415=newl; Line(l3415) = {p3415,p3416};
l3416=newl; Line(l3416) = {p3416,p3417};
l3417=newl; Line(l3417) = {p3417,p3418};
l3418=newl; Line(l3418) = {p3418,p3419};
l3419=newl; Line(l3419) = {p3419,p340};
ll340 = newll; Line Loop(ll340) = {l340,l341,l342,l343,l344,l345,l346,l347,l348,l349,l3410,l3411,l3412,l3413,l3414,l3415,l3416,l3417,l3418,l3419};
rs340 = news ; Plane Surface(rs340) = {ll340};
ex340[]= Extrude{0,0,17}{ Surface{rs340}; };
Physical Volume(34)={ex340[1]};
// High_k_2
p470=newp; Point(p470) = {-93,-132,-58.5, 1};
p471=newp; Point(p471) = {-21,-132,-58.5, 1};
p472=newp; Point(p472) = {-21,-192,-58.5, 1};
p473=newp; Point(p473) = {-8,-192,-58.5, 1};
p474=newp; Point(p474) = {-8,-132,-58.5, 1};
p475=newp; Point(p475) = {8,-132,-58.5, 1};
p476=newp; Point(p476) = {8,-192,-58.5, 1};
p477=newp; Point(p477) = {21,-192,-58.5, 1};
p478=newp; Point(p478) = {21,-132,-58.5, 1};
p479=newp; Point(p479) = {93,-132,-58.5, 1};
p4710=newp; Point(p4710) = {93,-130,-58.5, 1};
p4711=newp; Point(p4711) = {19,-130,-58.5, 1};
p4712=newp; Point(p4712) = {19,-190,-58.5, 1};
p4713=newp; Point(p4713) = {10,-190,-58.5, 1};
p4714=newp; Point(p4714) = {10,-130,-58.5, 1};
p4715=newp; Point(p4715) = {-10,-130,-58.5, 1};
p4716=newp; Point(p4716) = {-10,-190,-58.5, 1};
p4717=newp; Point(p4717) = {-19,-190,-58.5, 1};
p4718=newp; Point(p4718) = {-19,-130,-58.5, 1};
p4719=newp; Point(p4719) = {-93,-130,-58.5, 1};
l470=newl; Line(l470) = {p470,p471};
l471=newl; Line(l471) = {p471,p472};
l472=newl; Line(l472) = {p472,p473};
l473=newl; Line(l473) = {p473,p474};
l474=newl; Line(l474) = {p474,p475};
l475=newl; Line(l475) = {p475,p476};
l476=newl; Line(l476) = {p476,p477};
l477=newl; Line(l477) = {p477,p478};
l478=newl; Line(l478) = {p478,p479};
l479=newl; Line(l479) = {p479,p4710};
l4710=newl; Line(l4710) = {p4710,p4711};
l4711=newl; Line(l4711) = {p4711,p4712};
l4712=newl; Line(l4712) = {p4712,p4713};
l4713=newl; Line(l4713) = {p4713,p4714};
l4714=newl; Line(l4714) = {p4714,p4715};
l4715=newl; Line(l4715) = {p4715,p4716};
l4716=newl; Line(l4716) = {p4716,p4717};
l4717=newl; Line(l4717) = {p4717,p4718};
l4718=newl; Line(l4718) = {p4718,p4719};
l4719=newl; Line(l4719) = {p4719,p470};
ll470 = newll; Line Loop(ll470) = {l470,l471,l472,l473,l474,l475,l476,l477,l478,l479,l4710,l4711,l4712,l4713,l4714,l4715,l4716,l4717,l4718,l4719};
rs470 = news ; Plane Surface(rs470) = {ll470};
ex470[]= Extrude{0,0,17}{ Surface{rs470}; };
Physical Volume(47)={ex470[1]};
// Substrate N1
p520=newp; Point(p520) = {-121,-50,-108.5, 1};
p521=newp; Point(p521) = {121,-50,-108.5, 1};
p522=newp; Point(p522) = {121,-30,-108.5, 1};
p523=newp; Point(p523) = {-121,-30,-108.5, 1};
l520=newl; Line(l520) = {p520,p521};
l521=newl; Line(l521) = {p521,p522};
l522=newl; Line(l522) = {p522,p523};
l523=newl; Line(l523) = {p523,p520};
ll520 = newll; Line Loop(ll520) = {l520,l521,l522,l523};
rs520 = news ; Plane Surface(rs520) = {ll520};
ex520[]= Extrude{0,0,167}{ Surface{rs520}; };
Physical Volume(52)={ex520[1]};
// SiN_1
p350=newp; Point(p350) = {-93,-209,-16.5, 5};
p351=newp; Point(p351) = {93,-209,-16.5, 5};
p352=newp; Point(p352) = {93,-130,-16.5, 5};
p353=newp; Point(p353) = {19,-130,-16.5, 5};
p354=newp; Point(p354) = {19,-190,-16.5, 5};
p355=newp; Point(p355) = {10,-190,-16.5, 5};
p356=newp; Point(p356) = {10,-130,-16.5, 5};
p357=newp; Point(p357) = {-10,-130,-16.5, 5};
p358=newp; Point(p358) = {-10,-190,-16.5, 5};
p359=newp; Point(p359) = {-19,-190,-16.5, 5};
p3510=newp; Point(p3510) = {-19,-130,-16.5, 5};
p3511=newp; Point(p3511) = {-93,-130,-16.5, 5};
l350=newl; Line(l350) = {p350,p351};
l351=newl; Line(l351) = {p351,p352};
l352=newl; Line(l352) = {p352,p353};
l353=newl; Line(l353) = {p353,p354};
l354=newl; Line(l354) = {p354,p355};
l355=newl; Line(l355) = {p355,p356};
l356=newl; Line(l356) = {p356,p357};
l357=newl; Line(l357) = {p357,p358};
l358=newl; Line(l358) = {p358,p359};
l359=newl; Line(l359) = {p359,p3510};
l3510=newl; Line(l3510) = {p3510,p3511};
l3511=newl; Line(l3511) = {p3511,p350};
ll350 = newll; Line Loop(ll350) = {l350,l351,l352,l353,l354,l355,l356,l357,l358,l359,l3510,l3511};
rs350 = news ; Plane Surface(rs350) = {ll350};
ex350[]= Extrude{0,0,8}{ Surface{rs350}; };
Physical Volume(35)={ex350[1]};
// SiN_2
p360=newp; Point(p360) = {-93,-209,8.5, 5};
p361=newp; Point(p361) = {93,-209,8.5, 5};
p362=newp; Point(p362) = {93,-130,8.5, 5};
p363=newp; Point(p363) = {19,-130,8.5, 5};
p364=newp; Point(p364) = {19,-190,8.5, 5};
p365=newp; Point(p365) = {10,-190,8.5, 5};
p366=newp; Point(p366) = {10,-130,8.5, 5};
p367=newp; Point(p367) = {-10,-130,8.5, 5};
p368=newp; Point(p368) = {-10,-190,8.5, 5};
p369=newp; Point(p369) = {-19,-190,8.5, 5};
p3610=newp; Point(p3610) = {-19,-130,8.5, 5};
p3611=newp; Point(p3611) = {-93,-130,8.5, 5};
l360=newl; Line(l360) = {p360,p361};
l361=newl; Line(l361) = {p361,p362};
l362=newl; Line(l362) = {p362,p363};
l363=newl; Line(l363) = {p363,p364};
l364=newl; Line(l364) = {p364,p365};
l365=newl; Line(l365) = {p365,p366};
l366=newl; Line(l366) = {p366,p367};
l367=newl; Line(l367) = {p367,p368};
l368=newl; Line(l368) = {p368,p369};
l369=newl; Line(l369) = {p369,p3610};
l3610=newl; Line(l3610) = {p3610,p3611};
l3611=newl; Line(l3611) = {p3611,p360};
ll360 = newll; Line Loop(ll360) = {l360,l361,l362,l363,l364,l365,l366,l367,l368,l369,l3610,l3611};
rs360 = news ; Plane Surface(rs360) = {ll360};
ex360[]= Extrude{0,0,8}{ Surface{rs360}; };
Physical Volume(36)={ex360[1]};
// SiN_3
p370=newp; Point(p370) = {-93,-209,-41.5, 5};
p371=newp; Point(p371) = {93,-209,-41.5, 5};
p372=newp; Point(p372) = {93,-130,-41.5, 5};
p373=newp; Point(p373) = {19,-130,-41.5, 5};
p374=newp; Point(p374) = {19,-190,-41.5, 5};
p375=newp; Point(p375) = {10,-190,-41.5, 5};
p376=newp; Point(p376) = {10,-130,-41.5, 5};
p377=newp; Point(p377) = {-10,-130,-41.5, 5};
p378=newp; Point(p378) = {-10,-190,-41.5, 5};
p379=newp; Point(p379) = {-19,-190,-41.5, 5};
p3710=newp; Point(p3710) = {-19,-130,-41.5, 5};
p3711=newp; Point(p3711) = {-93,-130,-41.5, 5};
l370=newl; Line(l370) = {p370,p371};
l371=newl; Line(l371) = {p371,p372};
l372=newl; Line(l372) = {p372,p373};
l373=newl; Line(l373) = {p373,p374};
l374=newl; Line(l374) = {p374,p375};
l375=newl; Line(l375) = {p375,p376};
l376=newl; Line(l376) = {p376,p377};
l377=newl; Line(l377) = {p377,p378};
l378=newl; Line(l378) = {p378,p379};
l379=newl; Line(l379) = {p379,p3710};
l3710=newl; Line(l3710) = {p3710,p3711};
l3711=newl; Line(l3711) = {p3711,p370};
ll370 = newll; Line Loop(ll370) = {l370,l371,l372,l373,l374,l375,l376,l377,l378,l379,l3710,l3711};
rs370 = news ; Plane Surface(rs370) = {ll370};
ex370[]= Extrude{0,0,8}{ Surface{rs370}; };
Physical Volume(37)={ex370[1]};
// SiN_4
p380=newp; Point(p380) = {-93,-209,-66.5, 5};
p381=newp; Point(p381) = {93,-209,-66.5, 5};
p382=newp; Point(p382) = {93,-130,-66.5, 5};
p383=newp; Point(p383) = {19,-130,-66.5, 5};
p384=newp; Point(p384) = {19,-190,-66.5, 5};
p385=newp; Point(p385) = {10,-190,-66.5, 5};
p386=newp; Point(p386) = {10,-130,-66.5, 5};
p387=newp; Point(p387) = {-10,-130,-66.5, 5};
p388=newp; Point(p388) = {-10,-190,-66.5, 5};
p389=newp; Point(p389) = {-19,-190,-66.5, 5};
p3810=newp; Point(p3810) = {-19,-130,-66.5, 5};
p3811=newp; Point(p3811) = {-93,-130,-66.5, 5};
l380=newl; Line(l380) = {p380,p381};
l381=newl; Line(l381) = {p381,p382};
l382=newl; Line(l382) = {p382,p383};
l383=newl; Line(l383) = {p383,p384};
l384=newl; Line(l384) = {p384,p385};
l385=newl; Line(l385) = {p385,p386};
l386=newl; Line(l386) = {p386,p387};
l387=newl; Line(l387) = {p387,p388};
l388=newl; Line(l388) = {p388,p389};
l389=newl; Line(l389) = {p389,p3810};
l3810=newl; Line(l3810) = {p3810,p3811};
l3811=newl; Line(l3811) = {p3811,p380};
ll380 = newll; Line Loop(ll380) = {l380,l381,l382,l383,l384,l385,l386,l387,l388,l389,l3810,l3811};
rs380 = news ; Plane Surface(rs380) = {ll380};
ex380[]= Extrude{0,0,8}{ Surface{rs380}; };
Physical Volume(38)={ex380[1]};
// SiN_Top_1
p390=newp; Point(p390) = {-96,-130,-16.5, 5};
p391=newp; Point(p391) = {-96,-212,-16.5, 5};
p392=newp; Point(p392) = {96,-212,-16.5, 5};
p393=newp; Point(p393) = {96,-130,-16.5, 5};
p394=newp; Point(p394) = {93,-130,-16.5, 5};
p395=newp; Point(p395) = {93,-209,-16.5, 5};
p396=newp; Point(p396) = {-93,-209,-16.5, 5};
p397=newp; Point(p397) = {-93,-130,-16.5, 5};
l390=newl; Line(l390) = {p390,p391};
l391=newl; Line(l391) = {p391,p392};
l392=newl; Line(l392) = {p392,p393};
l393=newl; Line(l393) = {p393,p394};
l394=newl; Line(l394) = {p394,p395};
l395=newl; Line(l395) = {p395,p396};
l396=newl; Line(l396) = {p396,p397};
l397=newl; Line(l397) = {p397,p390};
ll390 = newll; Line Loop(ll390) = {l390,l391,l392,l393,l394,l395,l396,l397};
rs390 = news ; Plane Surface(rs390) = {ll390};
ex390[]= Extrude{0,0,33}{ Surface{rs390}; };
Physical Volume(39)={ex390[1]};
// SiN_Top_2
p400=newp; Point(p400) = {-96,-130,-66.5, 5};
p401=newp; Point(p401) = {-96,-212,-66.5, 5};
p402=newp; Point(p402) = {96,-212,-66.5, 5};
p403=newp; Point(p403) = {96,-130,-66.5, 5};
p404=newp; Point(p404) = {93,-130,-66.5, 5};
p405=newp; Point(p405) = {93,-209,-66.5, 5};
p406=newp; Point(p406) = {-93,-209,-66.5, 5};
p407=newp; Point(p407) = {-93,-130,-66.5, 5};
l400=newl; Line(l400) = {p400,p401};
l401=newl; Line(l401) = {p401,p402};
l402=newl; Line(l402) = {p402,p403};
l403=newl; Line(l403) = {p403,p404};
l404=newl; Line(l404) = {p404,p405};
l405=newl; Line(l405) = {p405,p406};
l406=newl; Line(l406) = {p406,p407};
l407=newl; Line(l407) = {p407,p400};
ll400 = newll; Line Loop(ll400) = {l400,l401,l402,l403,l404,l405,l406,l407};
rs400 = news ; Plane Surface(rs400) = {ll400};
ex400[]= Extrude{0,0,25}{ Surface{rs400}; };
Physical Volume(40)={ex400[1]};
// Oxide_2_Side_2_lo
p280=newp; Point(p280) = {55,-130,16.5, 10};
p281=newp; Point(p281) = {60,-130,16.5, 10};
p282=newp; Point(p282) = {60,-230,16.5, 10};
p283=newp; Point(p283) = {96,-230,16.5, 10};
p284=newp; Point(p284) = {96,-50,16.5, 10};
p285=newp; Point(p285) = {60,-50,16.5, 10};
p286=newp; Point(p286) = {22,-50,16.5, 10};
p287=newp; Point(p287) = {20.5,-90,16.5, 10};
p288=newp; Point(p288) = {19,-130,16.5, 10};
p289=newp; Point(p289) = {24.5,-147.5,16.5, 10};
p2810=newp; Point(p2810) = {30,-160,16.5, 10};
p2811=newp; Point(p2811) = {32.5,-150,16.5, 10};
p2812=newp; Point(p2812) = {35,-140,16.5, 10};
p2813=newp; Point(p2813) = {40,-135,16.5, 10};
p2814=newp; Point(p2814) = {50,-132.5,16.5, 10};
l280=newl; Line(l280) = {p280,p281};
l281=newl; Line(l281) = {p281,p282};
l282=newl; Line(l282) = {p282,p283};
l283=newl; Line(l283) = {p283,p284};
l284=newl; Line(l284) = {p284,p285};
l285=newl; Line(l285) = {p285,p286};
l286=newl; Line(l286) = {p286,p287};
l287=newl; Line(l287) = {p287,p288};
l288=newl; Line(l288) = {p288,p289};
l289=newl; Line(l289) = {p289,p2810};
l2810=newl; Line(l2810) = {p2810,p2811};
l2811=newl; Line(l2811) = {p2811,p2812};
l2812=newl; Line(l2812) = {p2812,p2813};
l2813=newl; Line(l2813) = {p2813,p2814};
l2814=newl; Line(l2814) = {p2814,p280};
ll280 = newll; Line Loop(ll280) = {l280,l281,l282,l283,l284,l285,l286,l287,l288,l289,l2810,l2811,l2812,l2813,l2814};
rs280 = news ; Plane Surface(rs280) = {ll280};
ex280[]= Extrude{0,0,17}{ Surface{rs280}; };
Physical Volume(28)={ex280[1]};
// Oxide_3_Side_2_lo
p290=newp; Point(p290) = {55,-130,-83.5, 10};
p291=newp; Point(p291) = {60,-130,-83.5, 10};
p292=newp; Point(p292) = {60,-230,-83.5, 10};
p293=newp; Point(p293) = {96,-230,-83.5, 10};
p294=newp; Point(p294) = {96,-50,-83.5, 10};
p295=newp; Point(p295) = {60,-50,-83.5, 10};
p296=newp; Point(p296) = {22,-50,-83.5, 10};
p297=newp; Point(p297) = {20.5,-90,-83.5, 10};
p298=newp; Point(p298) = {19,-130,-83.5, 10};
p299=newp; Point(p299) = {24.5,-147.5,-83.5, 10};
p2910=newp; Point(p2910) = {30,-160,-83.5, 10};
p2911=newp; Point(p2911) = {32.5,-150,-83.5, 10};
p2912=newp; Point(p2912) = {35,-140,-83.5, 10};
p2913=newp; Point(p2913) = {40,-135,-83.5, 10};
p2914=newp; Point(p2914) = {50,-132.5,-83.5, 10};
l290=newl; Line(l290) = {p290,p291};
l291=newl; Line(l291) = {p291,p292};
l292=newl; Line(l292) = {p292,p293};
l293=newl; Line(l293) = {p293,p294};
l294=newl; Line(l294) = {p294,p295};
l295=newl; Line(l295) = {p295,p296};
l296=newl; Line(l296) = {p296,p297};
l297=newl; Line(l297) = {p297,p298};
l298=newl; Line(l298) = {p298,p299};
l299=newl; Line(l299) = {p299,p2910};
l2910=newl; Line(l2910) = {p2910,p2911};
l2911=newl; Line(l2911) = {p2911,p2912};
l2912=newl; Line(l2912) = {p2912,p2913};
l2913=newl; Line(l2913) = {p2913,p2914};
l2914=newl; Line(l2914) = {p2914,p290};
ll290 = newll; Line Loop(ll290) = {l290,l291,l292,l293,l294,l295,l296,l297,l298,l299,l2910,l2911,l2912,l2913,l2914};
rs290 = news ; Plane Surface(rs290) = {ll290};
ex290[]= Extrude{0,0,17}{ Surface{rs290}; };
Physical Volume(29)={ex290[1]};
// Oxide_Middle
p300=newp; Point(p300) = {-10,-130,-83.5, 10};
p301=newp; Point(p301) = {10,-130,-83.5, 10};
p302=newp; Point(p302) = {8.5,-90,-83.5, 10};
p303=newp; Point(p303) = {7,-50,-83.5, 10};
p304=newp; Point(p304) = {-7,-50,-83.5, 10};
p305=newp; Point(p305) = {-8.5,-90,-83.5, 10};
l300=newl; Line(l300) = {p300,p301};
l301=newl; Line(l301) = {p301,p302};
l302=newl; Line(l302) = {p302,p303};
l303=newl; Line(l303) = {p303,p304};
l304=newl; Line(l304) = {p304,p305};
l305=newl; Line(l305) = {p305,p300};
ll300 = newll; Line Loop(ll300) = {l300,l301,l302,l303,l304,l305};
rs300 = news ; Plane Surface(rs300) = {ll300};
ex300[]= Extrude{0,0,117}{ Surface{rs300}; };
Physical Volume(30)={ex300[1]};
// Oxide_1_Side_1_lo
p310=newp; Point(p310) = {-60,-130,-33.5, 10};
p311=newp; Point(p311) = {-55,-130,-33.5, 10};
p312=newp; Point(p312) = {-50,-132.5,-33.5, 10};
p313=newp; Point(p313) = {-40,-135,-33.5, 10};
p314=newp; Point(p314) = {-35,-140,-33.5, 10};
p315=newp; Point(p315) = {-32.5,-150,-33.5, 10};
p316=newp; Point(p316) = {-30,-160,-33.5, 10};
p317=newp; Point(p317) = {-24.5,-147.5,-33.5, 10};
p318=newp; Point(p318) = {-19,-130,-33.5, 10};
p319=newp; Point(p319) = {-20.5,-90,-33.5, 10};
p3110=newp; Point(p3110) = {-22,-50,-33.5, 10};
p3111=newp; Point(p3111) = {-96,-50,-33.5, 10};
p3112=newp; Point(p3112) = {-96,-230,-33.5, 10};
p3113=newp; Point(p3113) = {-60,-230,-33.5, 10};
l310=newl; Line(l310) = {p310,p311};
l311=newl; Line(l311) = {p311,p312};
l312=newl; Line(l312) = {p312,p313};
l313=newl; Line(l313) = {p313,p314};
l314=newl; Line(l314) = {p314,p315};
l315=newl; Line(l315) = {p315,p316};
l316=newl; Line(l316) = {p316,p317};
l317=newl; Line(l317) = {p317,p318};
l318=newl; Line(l318) = {p318,p319};
l319=newl; Line(l319) = {p319,p3110};
l3110=newl; Line(l3110) = {p3110,p3111};
l3111=newl; Line(l3111) = {p3111,p3112};
l3112=newl; Line(l3112) = {p3112,p3113};
l3113=newl; Line(l3113) = {p3113,p310};
ll310 = newll; Line Loop(ll310) = {l310,l311,l312,l313,l314,l315,l316,l317,l318,l319,l3110,l3111,l3112,l3113};
rs310 = news ; Plane Surface(rs310) = {ll310};
ex310[]= Extrude{0,0,17}{ Surface{rs310}; };
Physical Volume(31)={ex310[1]};
// Oxide_3_Side_1_lo
p320=newp; Point(p320) = {-60,-130,-83.5, 10};
p321=newp; Point(p321) = {-55,-130,-83.5, 10};
p322=newp; Point(p322) = {-50,-132.5,-83.5, 10};
p323=newp; Point(p323) = {-40,-135,-83.5, 10};
p324=newp; Point(p324) = {-35,-140,-83.5, 10};
p325=newp; Point(p325) = {-32.5,-150,-83.5, 10};
p326=newp; Point(p326) = {-30,-160,-83.5, 10};
p327=newp; Point(p327) = {-24.5,-147.5,-83.5, 10};
p328=newp; Point(p328) = {-19,-130,-83.5, 10};
p329=newp; Point(p329) = {-20.5,-90,-83.5, 10};
p3210=newp; Point(p3210) = {-22,-50,-83.5, 10};
p3211=newp; Point(p3211) = {-96,-50,-83.5, 10};
p3212=newp; Point(p3212) = {-96,-230,-83.5, 10};
p3213=newp; Point(p3213) = {-60,-230,-83.5, 10};
l320=newl; Line(l320) = {p320,p321};
l321=newl; Line(l321) = {p321,p322};
l322=newl; Line(l322) = {p322,p323};
l323=newl; Line(l323) = {p323,p324};
l324=newl; Line(l324) = {p324,p325};
l325=newl; Line(l325) = {p325,p326};
l326=newl; Line(l326) = {p326,p327};
l327=newl; Line(l327) = {p327,p328};
l328=newl; Line(l328) = {p328,p329};
l329=newl; Line(l329) = {p329,p3210};
l3210=newl; Line(l3210) = {p3210,p3211};
l3211=newl; Line(l3211) = {p3211,p3212};
l3212=newl; Line(l3212) = {p3212,p3213};
l3213=newl; Line(l3213) = {p3213,p320};
ll320 = newll; Line Loop(ll320) = {l320,l321,l322,l323,l324,l325,l326,l327,l328,l329,l3210,l3211,l3212,l3213};
rs320 = news ; Plane Surface(rs320) = {ll320};
ex320[]= Extrude{0,0,17}{ Surface{rs320}; };
Physical Volume(32)={ex320[1]};
// Oxide_1_Side_2_lo
p330=newp; Point(p330) = {-60,-130,16.5, 10};
p331=newp; Point(p331) = {-55,-130,16.5, 10};
p332=newp; Point(p332) = {-50,-132.5,16.5, 10};
p333=newp; Point(p333) = {-40,-135,16.5, 10};
p334=newp; Point(p334) = {-35,-140,16.5, 10};
p335=newp; Point(p335) = {-32.5,-150,16.5, 10};
p336=newp; Point(p336) = {-30,-160,16.5, 10};
p337=newp; Point(p337) = {-24.5,-147.5,16.5, 10};
p338=newp; Point(p338) = {-19,-130,16.5, 10};
p339=newp; Point(p339) = {-20.5,-90,16.5, 10};
p3310=newp; Point(p3310) = {-22,-50,16.5, 10};
p3311=newp; Point(p3311) = {-96,-50,16.5, 10};
p3312=newp; Point(p3312) = {-96,-230,16.5, 10};
p3313=newp; Point(p3313) = {-60,-230,16.5, 10};
l330=newl; Line(l330) = {p330,p331};
l331=newl; Line(l331) = {p331,p332};
l332=newl; Line(l332) = {p332,p333};
l333=newl; Line(l333) = {p333,p334};
l334=newl; Line(l334) = {p334,p335};
l335=newl; Line(l335) = {p335,p336};
l336=newl; Line(l336) = {p336,p337};
l337=newl; Line(l337) = {p337,p338};
l338=newl; Line(l338) = {p338,p339};
l339=newl; Line(l339) = {p339,p3310};
l3310=newl; Line(l3310) = {p3310,p3311};
l3311=newl; Line(l3311) = {p3311,p3312};
l3312=newl; Line(l3312) = {p3312,p3313};
l3313=newl; Line(l3313) = {p3313,p330};
ll330 = newll; Line Loop(ll330) = {l330,l331,l332,l333,l334,l335,l336,l337,l338,l339,l3310,l3311,l3312,l3313};
rs330 = news ; Plane Surface(rs330) = {ll330};
ex330[]= Extrude{0,0,17}{ Surface{rs330}; };
Physical Volume(33)={ex330[1]};
// Oxide_1
p410=newp; Point(p410) = {-96,-130,-16.5, 10};
p411=newp; Point(p411) = {-19,-130,-16.5, 10};
p412=newp; Point(p412) = {-20.5,-90,-16.5, 10};
p413=newp; Point(p413) = {-22,-50,-16.5, 10};
p414=newp; Point(p414) = {-96,-50,-16.5, 10};
l410=newl; Line(l410) = {p410,p411};
l411=newl; Line(l411) = {p411,p412};
l412=newl; Line(l412) = {p412,p413};
l413=newl; Line(l413) = {p413,p414};
l414=newl; Line(l414) = {p414,p410};
ll410 = newll; Line Loop(ll410) = {l410,l411,l412,l413,l414};
rs410 = news ; Plane Surface(rs410) = {ll410};
ex410[]= Extrude{0,0,33}{ Surface{rs410}; };
Physical Volume(41)={ex410[1]};
// Oxide_3
p420=newp; Point(p420) = {-96,-130,-66.5, 10};
p421=newp; Point(p421) = {-19,-130,-66.5, 10};
p422=newp; Point(p422) = {-20.5,-90,-66.5, 10};
p423=newp; Point(p423) = {-22,-50,-66.5, 10};
p424=newp; Point(p424) = {-96,-50,-66.5, 10};
l420=newl; Line(l420) = {p420,p421};
l421=newl; Line(l421) = {p421,p422};
l422=newl; Line(l422) = {p422,p423};
l423=newl; Line(l423) = {p423,p424};
l424=newl; Line(l424) = {p424,p420};
ll420 = newll; Line Loop(ll420) = {l420,l421,l422,l423,l424};
rs420 = news ; Plane Surface(rs420) = {ll420};
ex420[]= Extrude{0,0,33}{ Surface{rs420}; };
Physical Volume(42)={ex420[1]};
// Oxide_2
p430=newp; Point(p430) = {96,-130,-16.5, 10};
p431=newp; Point(p431) = {96,-50,-16.5, 10};
p432=newp; Point(p432) = {22,-50,-16.5, 10};
p433=newp; Point(p433) = {20.5,-90,-16.5, 10};
p434=newp; Point(p434) = {19,-130,-16.5, 10};
l430=newl; Line(l430) = {p430,p431};
l431=newl; Line(l431) = {p431,p432};
l432=newl; Line(l432) = {p432,p433};
l433=newl; Line(l433) = {p433,p434};
l434=newl; Line(l434) = {p434,p430};
ll430 = newll; Line Loop(ll430) = {l430,l431,l432,l433,l434};
rs430 = news ; Plane Surface(rs430) = {ll430};
ex430[]= Extrude{0,0,33}{ Surface{rs430}; };
Physical Volume(43)={ex430[1]};
// Oxide_4
p440=newp; Point(p440) = {96,-130,-66.5, 10};
p441=newp; Point(p441) = {96,-50,-66.5, 10};
p442=newp; Point(p442) = {22,-50,-66.5, 10};
p443=newp; Point(p443) = {20.5,-90,-66.5, 10};
p444=newp; Point(p444) = {19,-130,-66.5, 10};
l440=newl; Line(l440) = {p440,p441};
l441=newl; Line(l441) = {p441,p442};
l442=newl; Line(l442) = {p442,p443};
l443=newl; Line(l443) = {p443,p444};
l444=newl; Line(l444) = {p444,p440};
ll440 = newll; Line Loop(ll440) = {l440,l441,l442,l443,l444};
rs440 = news ; Plane Surface(rs440) = {ll440};
ex440[]= Extrude{0,0,33}{ Surface{rs440}; };
Physical Volume(44)={ex440[1]};
// ILD0
p450=newp; Point(p450) = {-96,-230,-16.5, 10};
p451=newp; Point(p451) = {96,-230,-16.5, 10};
p452=newp; Point(p452) = {96,-212,-16.5, 10};
p453=newp; Point(p453) = {-96,-212,-16.5, 10};
l450=newl; Line(l450) = {p450,p451};
l451=newl; Line(l451) = {p451,p452};
l452=newl; Line(l452) = {p452,p453};
l453=newl; Line(l453) = {p453,p450};
ll450 = newll; Line Loop(ll450) = {l450,l451,l452,l453};
rs450 = news ; Plane Surface(rs450) = {ll450};
ex450[]= Extrude{0,0,33}{ Surface{rs450}; };
Physical Volume(45)={ex450[1]};
// ILD0_2
p460=newp; Point(p460) = {-96,-230,-66.5, 10};
p461=newp; Point(p461) = {96,-230,-66.5, 10};
p462=newp; Point(p462) = {96,-212,-66.5, 10};
p463=newp; Point(p463) = {-96,-212,-66.5, 10};
l460=newl; Line(l460) = {p460,p461};
l461=newl; Line(l461) = {p461,p462};
l462=newl; Line(l462) = {p462,p463};
l463=newl; Line(l463) = {p463,p460};
ll460 = newll; Line Loop(ll460) = {l460,l461,l462,l463};
rs460 = news ; Plane Surface(rs460) = {ll460};
ex460[]= Extrude{0,0,33}{ Surface{rs460}; };
Physical Volume(46)={ex460[1]};
// STI_1
p480=newp; Point(p480) = {-96,-230,-108.5, 10};
p481=newp; Point(p481) = {96,-230,-108.5, 10};
p482=newp; Point(p482) = {96,-50,-108.5, 10};
p483=newp; Point(p483) = {-96,-50,-108.5, 10};
l480=newl; Line(l480) = {p480,p481};
l481=newl; Line(l481) = {p481,p482};
l482=newl; Line(l482) = {p482,p483};
l483=newl; Line(l483) = {p483,p480};
ll480 = newll; Line Loop(ll480) = {l480,l481,l482,l483};
rs480 = news ; Plane Surface(rs480) = {ll480};
ex480[]= Extrude{0,0,25}{ Surface{rs480}; };
Physical Volume(48)={ex480[1]};
// STI_2
p490=newp; Point(p490) = {-96,-230,33.5, 10};
p491=newp; Point(p491) = {96,-230,33.5, 10};
p492=newp; Point(p492) = {96,-50,33.5, 10};
p493=newp; Point(p493) = {-96,-50,33.5, 10};
l490=newl; Line(l490) = {p490,p491};
l491=newl; Line(l491) = {p491,p492};
l492=newl; Line(l492) = {p492,p493};
l493=newl; Line(l493) = {p493,p490};
ll490 = newll; Line Loop(ll490) = {l490,l491,l492,l493};
rs490 = news ; Plane Surface(rs490) = {ll490};
ex490[]= Extrude{0,0,25}{ Surface{rs490}; };
Physical Volume(49)={ex490[1]};
// STI_Left
p500=newp; Point(p500) = {-121,-230,-108.5, 10};
p501=newp; Point(p501) = {-96,-230,-108.5, 10};
p502=newp; Point(p502) = {-96,-50,-108.5, 10};
p503=newp; Point(p503) = {-121,-50,-108.5, 10};
l500=newl; Line(l500) = {p500,p501};
l501=newl; Line(l501) = {p501,p502};
l502=newl; Line(l502) = {p502,p503};
l503=newl; Line(l503) = {p503,p500};
ll500 = newll; Line Loop(ll500) = {l500,l501,l502,l503};
rs500 = news ; Plane Surface(rs500) = {ll500};
ex500[]= Extrude{0,0,167}{ Surface{rs500}; };
Physical Volume(50)={ex500[1]};
// STI_Right
p510=newp; Point(p510) = {96,-230,-108.5, 10};
p511=newp; Point(p511) = {121,-230,-108.5, 10};
p512=newp; Point(p512) = {121,-50,-108.5, 10};
p513=newp; Point(p513) = {96,-50,-108.5, 10};
l510=newl; Line(l510) = {p510,p511};
l511=newl; Line(l511) = {p511,p512};
l512=newl; Line(l512) = {p512,p513};
l513=newl; Line(l513) = {p513,p510};
ll510 = newll; Line Loop(ll510) = {l510,l511,l512,l513};
rs510 = news ; Plane Surface(rs510) = {ll510};
ex510[]= Extrude{0,0,167}{ Surface{rs510}; };
Physical Volume(51)={ex510[1]};
// Substrate N2
p530=newp; Point(p530) = {-121,-30,-108.5, 201};
p531=newp; Point(p531) = {121,-30,-108.5, 201};
p532=newp; Point(p532) = {121,4970,-108.5, 201};
p533=newp; Point(p533) = {-121,4970,-108.5, 201};
l530=newl; Line(l530) = {p530,p531};
l531=newl; Line(l531) = {p531,p532};
l532=newl; Line(l532) = {p532,p533};
l533=newl; Line(l533) = {p533,p530};
ll530 = newll; Line Loop(ll530) = {l530,l531,l532,l533};
rs530 = news ; Plane Surface(rs530) = {ll530};
ex530[]= Extrude{0,0,167}{ Surface{rs530}; };
Physical Volume(53)={ex530[1]};
pAir1=newp; Point(pAir1) = {-121,-330,-108.5, 20};
pAir2=newp; Point(pAir2) = {121,-330,-108.5, 20};
pAir3=newp; Point(pAir3) = {121,4970,-108.5, 20};
pAir4=newp; Point(pAir4) = {-121,4970,-108.5, 20};
lAir1=newl; Line(lAir1) = {pAir1,pAir2};
lAir2=newl; Line(lAir2) = {pAir2,pAir3};
lAir3=newl; Line(lAir3) = {pAir3,pAir4};
lAir4=newl; Line(lAir4) = {pAir4,pAir1};
llAir = newll; Line Loop(llAir) = {lAir1,lAir2,lAir3,lAir4};
rsAir = news ; Plane Surface(rsAir) = {llAir};
vblock[]= Extrude{0,0,167}{ Surface{rsAir}; };
v() = BooleanFragments{ Volume{1:53}; Delete; }{ Volume{vblock[1]}; Delete; };
Physical Volume(0)={54};

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